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Other articles related with "metal insert poly-Si stack (MIPS)"：
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97306 |
Yong-Liang Li(李永亮), Qiu-Xia Xu(徐秋霞), Wen-Wu Wang(王文武) |
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Key technologies for dual high-k and dual metal gate integration |
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Chin. Phys. B
2018 Vol.27 (9): 97306-097306
[Abstract]
(579)
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[PDF 1824 KB]
(162)
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